For hazards that cannot be designed out, warnings, procedures, and instructions on proper use and servicing are provided. The diffusion pump uses the vapor of a boiling fluid to capture air molecules. The edwards ht and eo diffusion pumps offer the highest throughput pressure multiplied by pumping speed of any comparable sized pump, making them ideal for industrial processes that involve large quantities of gases. A diffusion pump is a stainless steel chamber that vary in size based on the application.
In general, the operation of a diffusion pump requires little attention. Aug 14, 2014 oil diffusion pumps remain in popular use in the vacuum heat treating industry, possibly one of the few applications remaining for this type of high vacuum pump in the western world. Using highquality oil will maximize the performance of your system and will minimize the need for maintenance. Ignition temperatures of dow corning 705 diffusion pump fluid vs. Generally speaking, the interior of diffusion pumps regardless of size is the same and consist of three varying sized, coneshaped pressure jets stacked vertically. The ulvac diffusion pumps have been designed for outstanding performance and extremely low running costs. When your process requires a pressure below that of a mechanical pump or mechanical pump and roots pump combination a. The dij series of diffusion pumps is a 5stage oil diffusion pump with an improved gas throughput and stable high pressure in the range of 103 mbar. Varian has earned its position as the leading diffusion pump manufacturer in the world by listening to customer needs and by continuously improving the performance and reliability of our benchmark designs. Oil diffusion pumps remain in popular use in the vacuum heat treating industry, possibly one of the few applications remaining for this type of high vacuum pump in the western world. If this single most important rule is observed, then most difficulties associated with diffusion pump operation can be eliminated.
The diffusion absorption refrigerator operation and performance. Mechanical pumps in mechanical pumps, the gas present in a vacuum system is transferred from a low pressure to a. So first off, the concept of the diffusion pump has been around for a century, but the working principle behind it has remained more or less. The original diffusion pump fluid used was mercury, which could withstand elevated temperatures but had a.
It is very reliable and longlived, although when misused it can create a great deal of contamination in the processing chamber. The ln2 will boil like mad initially as it hits the warm surfaces. Additionally, furnace operators need shorter cycle times to accomplish efficient processing of heattreated material batches. Other theories try to examine the pumping effect on the ground of the collisions between gas and vapour molecules, but with. Switch the diffusion pump heater on and wait for a minimum 12 hour. Educational guide to vacuum coating processing the oil diffusion pump often called the diff pump or dp is probably the most widely used highvacuum pump. Oil diffusion pump ulvac has drawn on a wealth of experience in evacuation technology to redesign the oil diffusion pumps meeting the demands of a new era. The first designs of diffusion pumps go back to 1915, when the pump was invented by irving langmuir.
However, it is highly recommended to first understand the basic diffusion pump working principle, and then read further regarding this topic. The pumping theory of diffusion pumps 101 a great pressure ratio, so a low forepressure. Agilent diffusion pumps offer high pumping speeds, high throughput, high tolerance forepressure, excellent backstreaming characteristics, low ultimate pressure, and longterm reliability. Maintenance and troubleshooting of oil diffusion pumps. Yet oil diffusion pumps require careful maintenance in order to sustain a high level of performance and maintain the integrity of the vacuum chamber. Basics of maintenance and troubleshooting of vacuum authors. They are reliable, simple in design, operate without noise or vibration, and are relatively inexpensive to operate and maintain. The diffusion pump is the most common type of pump for use. Agilent diffusion pumps offer high pumping speeds, high throughput, high tolerance forepressure, excellent backstreaming characteristics, low ultimate pressure, and long. Pump system analysis pump system analysis is often overlooked because it is assumed that the system was constructed with the installed pump in mind, and that operation of the pumps is in accordance with design specifications. Page 5 vacuum products for key applications nxdsxds dry scroll pumps emrv rotary vane pumps next turbomolecular pumps turbomolecular pumping stations stp magnetically levitated turbomolecular pumps epx high vacuum primary pumps ion getter pumps titanium sublimation pumps nonevaporable getter pumps measurement and control leak detection and measurement components and hardware.
Working mechanism of a centrifugal pump a centrifugal pump is one of the simplest pieces of equipment in any process plant. Doing so will maximize the performance of your system and will minimize the need for maintenance. Hydrocarbon diffusion pump fluid spontaneous ignition. They were the first type of high vacuum pumps operating in the regime of free molecular flow, where the movement of the gas molecules can be better understood as diffusion than by conventional fluid. Information about dow corning diffusion pump fluid dow. The different atex versions are designed according to the eu directive 201434eu relating to explosive atmospheres making them suitable for transporting explosive gases and. Operation of a diffusion pump without circulating cool water to the main body cooling coils. Stateoftheart, innovative vacuum pumps, components, standardized and fully customized vacuum solutions and services from leybold help to manufacture these products more precisely, economically, innovatively and, last but not least, more sustainably. A diffusion pump is a device designed to pump gases with a high speed vapor jet as a transport medium. Operation, maintenance and troubleshooting of oil diffusion pumps. The article has been written keeping in mind the level and interests of students and the beginners in operation. The complete dummys guide to operation of a typical. In fact, diffusion pumping is still the most economical means of creating highvacuum environments.
Safe operation metal diffusion pumps, which use an integral metal heating element that provides an electrical ground path to the entire pump body, can be severely damaged in the event of a bombarder flashback. Even as turbomolecular vacuum pumps have displaced most small laboratory sized oil diffusion pumps these days because of perceived ease of use and cleanliness, most high vacuum heat treating furnaces still rely on a large oil diffusion pumps to generate the pressures below about 103 torr needed for many metal conditioning processes. Diffusion pumps use a high speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the exhaust. Diffusion pump operations diffusion pump oil by enparticles. The size and type of forevacuum pump depends on the operating conditions and the quantities of gas which are to be pumped. Diffusion pumps diffusion pumps low cost of ownership by providing the highest throughput available per unit of power, reduced cooling water requirements, and rugged, durable stainless steel construction, agilent delivers large volume pumping at the lowest total cost to you. As a result, agilent diffusion pumps offer you the lowest cost of ownership available for many high vacuumpumping applications. The main reasons for their continued use are their longevity the lack of other options.
This article is going to focus on the more practical aspects of a diffusion pump, and where it is actually used. Vacuum diffusion pumps are one of the oldest and most reliable ways of. Oil diffusion pumps are still the most popular type of highvacuum pump because they are relatively inexpensive, highly reliable and very durable. Vacuum diffusion pumps are one of the oldest and most reliable ways of creating a vacuum down to 1010 torr, or even lower, at 25 c. As the air travels up the two side tubes water pulled in the bottom and shot out the top. Performance and operation american vacuum society monograph series hablanian, m. Agilent varian diffusion pumps because of its simplicity, high performance and low initial cost, the diffusion pump is the primary industrial high vacuum pumping mechanism. General applications and accessories for oil diffusion pumps. This application note will explain practical steps that can be taken to ensure optimal performance of oil diffusion pumps in a production environment. Oil diffusion vacuum pumps the oil diffusion pumps and oil vapor jet pumps from leybold are ideally suited for industrial high vacuum applications. High throughput diffusion pumps draft 122304 diffusion pump hazards designers of systems utilizing diffusion pumps must design out hazards wherever possible. Advantages of dp provides high throughput for handling large gas. Larger pumps often take longer, in fact just about all diffusion pumps take about an hour to really get going but may be usable in less time with less performance.
This article will explain practical steps that can be taken to ensure optimal performance of oil. The uhimate pressure and pressure ratio are shown in fig. This article will explain practical steps that can be taken to ensure optimal performance of. The most important rule of diffusion pump operation is. Varian has earned its position as the leading diffusion pump manufacturer in. Pump headflow curves are typically given for clear water. The procedure for cleaning diffusion pumps working with hydrocarbon fluids is as follows. Operation of the diffusion pump without continuous. This process takes place as a result of the fact that gases resist diffusion in the vapor stream and are more inclined to move along with it. Diffusion pump working principle diffusion pump oil by. Operation of the diffusion pump without continuous evacuation below 0. The diffusion absorption refrigerator operation and.
Depending on the size of the coating, sputtering as a process can sometimes become a costly process, and to keep the costs on a reasonable level, diffusion. Operating pump with water trapped in optional quick cool coil. Foreign matter in the pumping fluid, which changes its viscosity and obstructs flow passages. The choice of pump for a given application depends largely on how the pump headflow characteristics match the requirement of the system downstream of the pump.
Vhs4 diffusion pump x draft 8702 explosion operation of the diffusion pump without continuous evacuation below 0. After the turbomolecular pump was invented, they were grouped under the umbrella term of momentum transfer pumps, even though they are both diffusion pumps in the old sense. Vacuum technology is an elementary component in the production of vital but also of aesthetic things and products. Maintenance and troubleshooting of oil diffusion pumps agilent. Performance and operation american vacuum society monograph series. Diffusion pumps cannot function at all unless the foreline pressure is held below this limit by the backing pump. Jun 21, 2016 operation, maintenance and troubleshooting of oil diffusion pumps oil diffusion pumps are still the most popular type of highvacuum pump because they are relatively inexpensive, highly reliable. Vacuum technologies d i f f u s i o n p u m p s vacuum furnaces vacuum furnace applications require pumps that are capable of achieving stable pressures in high gas flow environments. Apr 20, 2020 a diffusion pump is a device designed to pump gases with a high speed vapor jet as a transport medium.
This occurs when a heavy, high speed vapor molecule collides with a. In addition, there are two types of analyzers stainless steel or. The pumping speed ranges from 2,400 ls to 33,000 ls and has a operating range of 101 to 107 mbar more. Theory of operation diffusion pumps are vapor jet pumps that work on the principle of momentum transfer. The installation, operation, and servicing of diffusion pumps involves one or more of the hazards in 1. Diffusion pumps differ from conventional mechanical pumps in that they use a high speed jet of fluid to direct gas molecules in the pump throat down to the bottom of the pump and out the exhaust, which is usually called the foreline. As a result of this superior performance, it is often possible to use the mseries pumps without traps or baffles. Mar 08, 2007 oil diffusion pumps are still the most popular type of highvacuum pump because they are relatively inexpensive, highly reliable and very durable. These pumps are designed to pump down from atmospheric pressure, but prolonged operation at inlet pressures higher than specified may reduce bearing life. Operation, maintenance and troubleshooting of oil diffusion pumps oil diffusion pumps are still the most popular type of highvacuum pump because they. High vacuum connection dn 630 isok fore vacuum connection dn 160 isok pumping speed for air at 104 mbar 20,000 literssec.
Diffusion pump fluid 40 to 734 304 to 483 300 478 269 580 to 901 893 516 455 430 267 806 5 633 429 267 804 5 1journal of vacuum science and technology, vol. The edwards diffstak vapour diffusion pumps are compact, watercooled pumps with integral cooled baffles which provide exceptionally clean pumping. This occurs when a heavy, high speed vapor molecule collides with a gas. Basics of maintenance and troubleshooting of vacuum. Some glass diffusion pumps use an immersion heater, which goes through the pump body and into the boiler and also exposes the. To attain correet numerieal results secondary effects ate supposed.
They are characterized by superior vacuum performance data and are welladapted as reliable components in medium vacuum and high vacuum systems due to their rugged design. These diffusion pumps can be used on processes with high critical backing pressure and feature baffles to ensure backstreaming is minimized. These pumps are offered with integral manual or pneumatic high vacuum valves. The proven design ensures very low backstreaming, reduced outgassing and minimized sealing requirements. The pump should be cleaned as thoroughly as possible before filling to ensure that no traces of solvent are present which may affect vacuum performance. Oil diffusion pumps forevacuum in all cases diffusion pumps require a sufficiently sized backing pump see technical data. Santovac 5 diffusion pump fluid of santovac fluids, inc. This chapter focuses on the diffusion absorption refrigerator dar cycle and describes a new advanced thermodynamic model which allows good predictions of. The diffusion pump was the first of these large openthroat devices meant to accept gas by diffusion.
The thin film will stick and since the molecules are only produced under high vacuum, diffusion pumps are needed due to the chemicals and molecular particles that come with the process. Doing so will maximize the performance of your system and. The capture efficiency of the vapor jet depends on its density, velocity and molecular weight. Busch cobra atex busch vacuum solutions united kingdom. Worldclass service, training and support agilents application. Because of its simplicity, high performance and low initial cost, the diffusion pump is the primary industrial high vacuum pumping mechanism. Please use guards, safety features, and interlocks as recommended. Diffusion vacuum pumps df 2800 a busch vacuum solutions. Pumps and pumping system bureau of energy efficiency 118 figure 6. Continuous operation at operating pressures above 104mbar 0. The cobra nc is a series of high performance and robust dry screw vacuum pumps for demanding applications with maximum flexibility and modularity for process changes.
939 1616 452 1005 1501 299 1553 309 649 1410 884 212 306 165 183 267 605 1054 1392 1041 1621 236 626 962 1158 920 871 99 739 1380 707 205 1323 468 762